INTEGRATED INTERFACE ELECTRONICS FOR CAPACITIVE MEMS INERTIAL SENSORS Doctoral Dissertation
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چکیده
OF DOCTORAL DISSERTATION AALTO UNIVERSITY SCHOOL OF SCIENCE AND TECHNOLOGY P.O. BOX 11000, FI-00076 AALTO http://www.aalto.fi Author Lasse Aaltonen Name of the dissertation Manuscript submitted May 3, 2010 Manuscript revised August 30, 2010 Date of the defence October 29, 2010 Article dissertation (summary + original articles) Monograph Faculty Department Field of research Opponent(s) Supervisor Instructor Abstract
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